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Thin films of vanadium oxides for ethanol sensor applications were been prepared by means of rf reactive sputtering from a vanadium pentoxide target in an Ar–O2 atmosphere. Films with the best sensitivity and selectivity were obtained with 15% oxygen at a working temperature between 280 and 300 °C. These films show a very low sensitivity to CO, CO2, and CH4 and total insensivity to NH3.
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Micocci et al. (Wed,) studied this question.
synapsesocial.com/papers/69d71fbccd480cb7e5f508ff — DOI: https://doi.org/10.1116/1.580471
G. Micocci
University of Salento
A. Serra
University of Salento
A. Tepore
University of Salento
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
University of Salento
Istituto Nazionale di Fisica Nucleare, Sezione di Lecce
Institute for the Dynamics of Environmental Processes
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