Techniques for combinatorial molecular beam epitaxy

Basic considerations for implementing combinatorial approach to molecular beam epitaxy (MBE) are discussed, focusing on the key issues relevant to conventional MBE synthesis using solid sources and characterization. The primary objective for implementing combinatorial approach is to make MBE do more, more able to carry out controlled and systematic work in large parameter space, without sacrificing any existing capabilities of conventional MBE. Methods for accomplishing this by integrating current instrumentation technology are described.