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January 1, 1972Proceedings of the IEEE

Ion implantation in semiconductors—Part II: Damage production and annealing

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JGJ. F. GibbonsUniversity College Dublin

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J. F. Gibbons (1972) studied this question.

synapsesocial.com/papers/69e52de590d379e88cd37ce0https://doi.org/10.1109/proc.1972.8854
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