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A fiber-optic Fabry-Pérot acoustic sensor with a <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">~100- nm</tex></formula> -thick multilayer graphene diaphragm is reported. Acoustic testing demonstrates a pressure-induced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">~ 60~μ Pa/ Hz1/2</tex></formula> at the frequency of 10 kHz. The sensor exhibits a flat frequency response from 0.2 to 22 kHz and may be useful for highly sensitive acoustic sensing.
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Ma et al. (2013) studied this question.
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