Analysis of the control of the excitation process in a vibrating gyroscope microelectromechanical system (MEMS)

Vibrating environments can cause deviation or change in the rotor parameters of MEMS and affect their performance. In the current study, in order to effective use improvement of MEMS gyroscopes, a technique to evaluate the reliability of parameters destruction under vibration will be introduced. First, principle of operation of MEMS gyroscopes rotors will be analyzed, and then effects of their parameters under vibration will be investigated. Focus on two key performance indexes such as zero-bias and scale factor, an accelerated destruction pattern is extended by using the distribution assumption technique. Next, destruction data of these characteristics under several vibration conditions are collected and by the Copula function, a reliability evaluation technique will be developed to examine the destruction of both MEMS gyroscopes rotor’s factors under vibration, which allows determining the reliability of these characteristics. Experimental results confirm that enhancing stress amounts cause a decrease in destruction time and an increase in the destruction rate of MEMS gyroscopes rotors, and substantial variations in the zero-bias characteristics are determined.