Key points are not available for this paper at this time.
Nanophotonic (photonic crystal) cavities with high Q factor and low mode volume are promising for research in the field of on-chip nonlinear and quantum optics on a crystal. In this paper, the Q factor, mode area, mode volume, and Purcell factor of a nanophotonic cavity based on silicon and silicon nitride are calculated to generate high-Q resonant states.
Garifullin et al. (Mon,) studied this question.