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Nanophotonic (photonic crystal) cavities with high Q factor and low mode volume are promising for research in the field of on-chip nonlinear and quantum optics on a crystal. In this paper, the Q factor, mode area, mode volume, and Purcell factor of a nanophotonic cavity based on silicon and silicon nitride are calculated to generate high-Q resonant states.
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Garifullin et al. (2025) studied this question.
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