A microelectromechanically controlled cavity optomechanical sensing system

Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground state cooling of nanoscale objects. By integrating a novel cavity optomechanical structure into an actuated MEMS sensing platform, we demonstrate a system with high quality-factor interferometric readout, electrical tuning of the optomechanical coupling by two orders of magnitude, and a mechanical transfer function adjustable via feedback. The platform separates optical and mechanical components, allowing flexible customization for specific scientific and commercial applications. We achieve displacement sensitivity of 4.6 fm/Hz^1/2 and force sensitivity of 53 aN/Hz^1/2 with only 250 nW optical power launched into the sensor. Cold-damping feedback is used to reduce the thermal mechanical vibration of the sensor by 3 orders of magnitude and to broaden the sensor bandwidth by approximately the same factor, to above twice the fundamental frequency of ≈ 40 kHz. The readout sensitivity approaching the standard quantum limit is combined with MEMS actuation in a fully integrated, compact, low power, stable system compatible with Si batch fabrication and electronics integration.