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A dexterous micro manipulation system is developed for application in assembling micro machine, manipulating cells, and micro surgery. We propose a concept of a two finger micro hand, then design and build a finger module based on parallel mechanisms. The module has 6 degrees of freedom with piezo electric devices as actuators. A calibration method based on least square error is proposed for translational motion in task coordinates fixed under a microscope. Coordinated motion is generated by both programming control and joystick teleoperation control. Basic characteristics, such as positioning accuracy, step response, and working space, are evaluated.
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Arai et al. (1997) studied this question.
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