Experimental characterization demonstrates improved operation times in mechanically coupled micromirrors, indicating potential application advancements.
The concept, design, technological fabrication and experimental characterization of a function unit consisting of two mechanically coupled MEMS micromirrors, denoted in this paper as Tandem Micromirrors (TMM) unit, are presented. Conventional single micromirrors reveal much faster closing than reopening times, which is undesirable for some applications. The future and final goal is to equalize these two characteristic times using TMM. Methodologically, this shall be achieved by combining the closing operation of a first mirror with the opening operation of a second one and the closing operation of the second mirror with the opening operation of the first. The focus of this paper is the design and development of the coupling elements between the two mirrors, as well as the technological fabrication and characterization of the mechanically coupled bidirectional electrostatic actuation of the tandem micromirrors.
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Abuhasnah et al. (2026) studied this question.
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