First-Principles-Informed Unified Transport Model for Resolving Parameter Non-Identifiability in Sub-10 nm Ruthenium Interconnects

Mochamad Januar; M. H. Lee

doi:10.1039/d6tc01319h

January 1, 2026Journal of Materials Chemistry C

First-Principles-Informed Unified Transport Model for Resolving Parameter Non-Identifiability in Sub-10 nm Ruthenium Interconnects

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Key Points

The aim is to develop a model that accurately connects process conditions to transport performance in ruthenium interconnects.
Developed a first-principles-informed transport model
Analyzed sub-10 nm ruthenium interconnects
Addressed parameter non-identifiability in simulations
Illustrated improved identifiability of transport parameters
Showed enhanced correlation between process conditions and performance metrics
Supported the feasibility of ruthenium in advanced interconnect applications

Implication

Presents a novel model to analyze transport behavior in ruthenium interconnects, suggesting improved performance insights for advanced technologies.

Abstract

As backend interconnect dimensions approach the sub-10 nm regime, ruthenium (Ru) is increasingly attractive as a barrier-lean conductor, yet linking process conditions to transport performance remains difficult because transport parameters...

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Cite This Study

Januar et al. (2026) studied this question.

synapsesocial.com/papers/6a1bd1db5783ba022b6fd514 https://doi.org/10.1039/d6tc01319h

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First-Principles-Informed Unified Transport Model for Resolving Parameter Non-Identifiability in Sub-10 nm Ruthenium Interconnects

Key Points

Implication

Abstract

Discussion

Cite This Study

First-Principles-Informed Unified Transport Model for Resolving Parameter Non-Identifiability in Sub-10 nm Ruthenium Interconnects

Key Points

Implication

Abstract

Discussion

Cite This Study

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