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July 1, 1994Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Fabrication of nanometer-scale structures using atomic force microscope with conducting probe

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Authors

THTakeo HattoriChiba UniversityYEYasunori EjiriMusashi UniversityKSKenji SaitoITER

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Cite This Study

Hattori et al. (1994) studied this question.

synapsesocial.com/papers/6a1c2f1726cb5670aa9d7c96https://doi.org/10.1116/1.579062
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