NAND flash memory is evolving from 2D to 3D structure since 2D NAND flash faced its limitation of size reduction. In this paper, the limitations of 2D planar technology and the development history of 3D NAND flash will be reviewed. Finally, we will discuss the problems to overcome in order to succeed the development of 3D NAND flash.
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Kim et al. (2017) studied this question.
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