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February 15, 1975Applied Physics Letters

On etching very narrow grooves in silicon

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DKDon L. KendallCalifornia Institute of Technology

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Don L. Kendall (1975) studied this question.

synapsesocial.com/papers/6a1d29b828423f2ce504d70fhttps://doi.org/10.1063/1.88113
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