Demonstrates high-performance OTSs with atomically homogeneous GeTe thin films, suggesting enhanced integration possibilities.
Atomically homogeneous amorphous GeTe thin films are realized via coordinated sub-cycle modulation ALD, synchronizing deposition with in situ diffusion. This enables high-performance OTSs and offers new possibilities for 3D integration.
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Hu et al. (2026) studied this question.
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