Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures

Analytical expressions are provided for the energy loss from vibrating mechanical resonators into their support structures for two limiting cases: supports that can be treated as plates, and supports that act as semi-infinite elastic media, with effectively infinite thickness. The former case is applicable to many microscale resonators, while the latter is appropriate for nanoscale devices. General formulations are given, applicable to a wide range of resonator geometries. These formulations are then applied to two geometries commonly used in microelectromechanical systems and nanelectromechanical systems applications: cantilevered beams and doubly fixed beams. Experimental data are presented to validate the finite-thickness support theory, and the predictions of the theory are also compared to data from existing literature for a microscale rectangular paddle oscillator.