An overview is given of correction methods for quantitative electron probe microanalysis (EPMA). First, the physical basis of the technique is described; this includes a short treatment of earlier proposals to solve the problem. After pointing out the limitations of these methods, attention is focused on the more recent “curve‐fitting” approaches to derive correction formulae. It is concluded that several such methods are available which give very good results and that the original objective of producing a universal correction procedure for EPMA is now within grasp.
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Scott et al. (1990) studied this question.
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