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May 1, 1991Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Plasma diffusion from a low pressure radio frequency source

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Authors

CCChristine CharlesUniversité Claude Bernard Lyon 1RBR. W. BoswellAustralian National UniversityABA. BouchouleUniversité d'Orléans

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Cite This Study

Charles et al. (1991) studied this question.

synapsesocial.com/papers/6a21a017db71e1dfcf8b7efchttps://doi.org/10.1116/1.577385
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