A simple one‐step process to fabricate three‐ dimensional (3D) microstructures is reported. Based on two‐photon excited‐state chemistry, a chemically amplified positive tone photoresist has been developed and the lithographic process investigated. The results, as indicated by the fabricated material (see Figure) suggest that positive tone two‐photon 3D microfabrication may be a valuable route to precision microfluidic and microoptical devices.
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Yu et al. (2003) studied this question.
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