Three-Dimensional Microstructures Created by Laser Microfabrication Technology

Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 µm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 µm and 0.3 µm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.