The influence of the band structure on the Auger electron spectrum of silicon

The Auger spectrum of Si, in which primary ionization occurs in the L shell with subsequent emission of an Auger electron from the valence band, is shown to be a consequence of the band structure. Energy levels within the valence band from which such emission takes place may be identified with peaks in the theoretical density of states calculations. The effects of oxidation on the spectrum which result from a change in the density of states is discussed.