Monolithic micro-coaxial power dividers

A three-port, 450 µm tall, monolithic rectangular coaxial power divider is introduced. The device is fabricated by a surface micromachining process with six sequentially deposited copper layers with thicknesses of 50 and 100 µm. The divider has an overall loss of 0.2 dB at 30 GHz, the input port return loss is better than 10 dB and the output amplitude and phase misbalances are ±0.35 dB and ±2.2°, respectively, from 20 to 40 GHz. The device is designed in a way that permits straightforward realisation of a Wilkinson divider with integrated resistor.