Antimony‐doped tin oxide films were prepared on Corning glass substrate by chemical vapor deposition from a gas mixture of SnCl 4 –SbCl 5 –H 2 O. The electrical conductivity and optical transmission of tin oxide films were studied with antimony doping. The film conductivity increased largely without losing optical transparency with a small addition of antimony. The increase of the conductivity was attributed mainly to more electrons donated by pentavalent Sb ions in the SnO 2 lattice. Large additions of antimony, however, diminished the conductivity, optical transparency, and crystallinity of the film. The diminution was found to be caused by fine Sb 2 O 5 phases codeposited with SnO 2 .
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Kim et al. (1994) studied this question.
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