Dependence of the electron heating on the configuration of magnetic fields applied to an inductively coupled plasma is investigated by Monte Carlo simulations to seek for desirable conditions for sustaining processing plasmas at low pressures. The separation between two DC coils to induce the confronting divergent magnetic fields, whose separatrix may work as a magnetic shutter applicable to plasma confinement and modulation, and the driving frequency are taken as control parameters. determines the volume of the resonant region, where the electron heating by the partial resonance is promoted, and its distance from the RF antenna. The electron heating is evaluated at MHz, MHz, and MHz by changing . The expansion of the resonant region at enhances the electron heating via increase of electrons in the resonant region, but the electron confinement weakens. On the other hand, the high‐frequency driving at and enhances the electron heating, keeping the electron confinement operative. It is demonstrated that the high‐frequency driving has an advantage that the resonant region formed in regions of stronger magnetic fields is wider and closer to the RF antenna. © 2026 Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.
Yamakita et al. (Wed,) studied this question.