Magnetic Confinement Effects in a Hybrid DC–RF Internal-Antenna Inductively Coupled Plasma: Spatial Diagnostics and Semi-Empirical Modelling

A hybrid DC–RF inductively coupled plasma (ICP) driven by a single-turn internal antenna was experimentally investigated to quantify magnetic confinement effects in low-pressure argon discharges. Superposition of a dc current on the RF antenna generated an azimuthal magnetic field that modified electron transport and reduced cross-field diffusion in the near-antenna region. Spatially resolved measurements of plasma density, electron temperature, plasma potential, and magnetic-field components were obtained using Langmuir, emissive, and B-dot probes. Increasing the dc current enhanced electron confinement and increased the plasma density by up to an order of magnitude at low RF power, together with improved radial and axial uniformity. A semi-empirical diffusion model incorporating electron-temperature-dependent ambipolar transport reproduced the measured ion-density distributions, ni(R,Z), within ±15%. The results support the interpretation that the discharge behaviour is governed by the coupled effects of localized magnetic confinement and inductive power deposition, and show that hybrid DC–RF excitation provides an effective route to denser and more spatially extended plasmas under low-pressure conditions.