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November 5, 2004Journal of Applied Physics

Stress reduction in tungsten films using nanostructured compliant layers

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Authors

TKTansel KarabacakUniversity of Arkansas at Little RockCPCatalin R. PicuRensselaer Polytechnic InstituteJSJay J. SenkevichMassachusetts Institute of Technology

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Karabacak et al. (2004) studied this question.

synapsesocial.com/papers/6a5cc673bcb839ae37c519c7https://doi.org/10.1063/1.1803106
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