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我们测量了蓝宝石上硅中自由载流子寿命对 O+ 离子注入剂量的依赖性。在低注入剂量下，载流子捕获率与离子注入引入的缺陷密度线性增加。在剂量超过 3×10^14 cm−2 时，测得的载流子寿命达到了 600 fs 的极限。
Doany 等 (Mon,) 研究了这个问题。
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