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A new film-bulk method is used for the measurement of the depth distribution of current density and absorption of incident primary electrons penetrating into solid targets of Be, Al, Cu, and Au, As well the depth dependence of the generation of secondary electrons in the interior of the targets is determined experimentally. The energy transfer curves resulting from the inelastic multiple scattering of the primary electrons show a maximum at the depth x0(E0). This makes possible the quantitative volume spectroscopy by a beam of primary electrons of variable energy E0.
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Fitting et al. (1977) studied this question.
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