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Hall nano-probes fabricated by focused ion beam A. Candini; CG Gazzadi; A. Di Bona; AFFRONTE, Marco ; D. Ercolani; G. Biasiol; SORBA, Lucia 2006 Abstract Hall magnetometers with active areas down to 100 x 100 nm(2) were fabricated patterning gold and Si-doped GaAs films by focused ion beam. For GaAs probes, electrical characterization shows that the magnetic flux sensitivity is better than 10(-2)Phi(0) at room temperature. Hall nano-probes made of gold can work down to liquid helium temperature with magnetic flux sensitivity 10(-1)Phi(0).
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Candini et al. (2006) studied this question.
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