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June 1, 1968Philosophical magazine

Observation of ion bombardment damage in silicon

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Authors

DMD.J. MazeyOak Ridge National LaboratoryRNR.S. NelsonSan Diego State UniversityRBR.S. BarnesUniversity of the Witwatersrand

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Mazey et al. (1968) studied this question.

synapsesocial.com/papers/6a6f2ef178a11c550e08dd74https://doi.org/10.1080/14786436808223192
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