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August 1, 1957Journal of Applied Physics

Damage to Silicon Produced by Bombardment with Helium Ions

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Authors

UGU. F. GianolaNTT (Japan)

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U. F. Gianola (1957) studied this question.

synapsesocial.com/papers/6a72bcc6b27f158178281ce8https://doi.org/10.1063/1.1722877
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