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March 1, 1978Journal of Vacuum Science and Technology

Planar magnetron sputtering

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Authors

RWRobert K. WaitsSunnyvale Public Library

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Robert K. Waits (1978) studied this question.

synapsesocial.com/papers/6a6f4dac31a3df824327b4fdhttps://doi.org/10.1116/1.569451
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