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Synthesize the core mechanisms, equipment configurations, and advanced technological variations of magnetron sputtering for engineering functional thin films.

August 16, 2026Transactions of the IMF

Magnetron sputtering: a systematic review of configuration and key principles for thin film deposition

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Authors

MSMahdiyeh SoltanalipourSahand University of Technology JKJafar Khalil‐AllafiSahand University of Technology

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Implication

Systematic review details core mechanisms and configurations of magnetron sputtering for thin films, highlighting modern industrial advancements like high-power impulse magnetron sputtering.

Key Points

Synthesize the core mechanisms, equipment configurations, and advanced technological variations of magnetron sputtering for engineering functional thin films.
Conducted a systematic review of physical vapor deposition literature, focusing on sputtering and ion bombardment processes.
Evaluated system configurations and operational parameters that govern thin film durability and performance across industrial fields.
Examined advanced deposition approaches, including closed-field unbalanced magnetron sputtering and high-power impulse magnetron sputtering.
Identifies ion bombardment control and chamber configuration as critical determinants of thin film microstructure, adhesion, and overall coating durability.
Highlights closed-field unbalanced magnetron sputtering (CFUBMS) and high-power impulse magnetron sputtering (HiPIMS) as leading technologies for high-density, large-scale industrial surface engineering.

Cite This Study

Soltanalipour et al. (2026) studied this question.

synapsesocial.com/papers/6a8179dcf2fb91fc834ad4d4 https://doi.org/10.1080/00202967.2026.2710739

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Implication

Systematic review details core mechanisms and configurations of magnetron sputtering for thin films, highlighting modern industrial advancements like high-power impulse magnetron sputtering.

Magnetron sputtering: a systematic review of configuration and key principles for thin film deposition

Discussion

Member takes

Implication

Key Points

Cite This Study

Magnetron sputtering: a systematic review of configuration and key principles for thin film deposition

Discussion

Member takes

Implication

Key Points

Cite This Study

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