Experimental study demonstrates doubled actuator travel range via charge control, indicating viable improvements for optical microelectromechanical systems.
A method for driving an electrically floating, bidirectional electrostatic actuator using high-speed switching and charge control has been proposed and verified experimentally. A macroscopic experiment is used to model the operation of a surface-micromachined microelectromechanical systems (MEMS) device having the form of two parallel electrodes, one rigid, and the other flexible. The movable, or "free" electrode, is connected to ground via a switching device, and the stationary electrode is connected to a single voltage source. The free electrode is alternately charged by induction, then left floating and subjected to a field produced by the stationary electrode. This charge-control mode of operation overcomes the travel range limits associated with the well-known "snap-through" instability. Our proof-of-concept experiment shows that a periodic charging/driving cycle increases the possible travel range of the free electrode by a factor of two over that possible without charge control. The configuration has the potential for use in a variety of optical MEMS applications involving mirror surfaces that must be exposed to the outside world.
No takes yet. Share an insight, caveat, or question.
Sugimoto et al. (2005) studied this question.
Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context: