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September 1, 1971Journal of Vacuum Science and Technology

Ion-Beam Techniques for Device Fabrication

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Authors

ESE. G. SpencerRutgers, The State University of New JerseyPSP. H. SchmidtAT&T (United States)

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Spencer et al. (1971) studied this question.

synapsesocial.com/papers/6a6f72e0a2d7cf2e39c28e50https://doi.org/10.1116/1.1316390
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