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April 1, 1977Applied Physics Letters

Ion-implanted silicon profiles in GaAs

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Authors

DLD. H. LeeHRL Laboratories (United States)RMR. M. MalbonUniversity of Southern California

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Lee et al. (1977) studied this question.

synapsesocial.com/papers/6a6f74df3ce530166bc2a018https://doi.org/10.1063/1.89386
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