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December 1, 1973C R C Critical Reviews in Solid State Sciences

Techniques for elemental composition profiling in thin films

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JCJ. W. CoburnUniversity of UtahEKE. KayPrinceton University

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Coburn et al. (1973) studied this question.

synapsesocial.com/papers/6a6f7631e71d69abee0807b9https://doi.org/10.1080/10408437308245843
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