Deposition of superconducting Y-Ba-Cu-O films at 400 °C without post-annealing

Superconducting thin films of Y1Ba2Cu3O7−x were fabricated using the process of plasma-assisted laser deposition. The substrate temperature was as low as 400 °C and high-temperature post-annealing in an O2 atmosphere was not necessary. The as-deposited films have a Tc of ∼85 K, and are oriented mostly with the c axis perpendicular to the substrate surface. The measured Jc at 80 K was 105 A/cm2.