Production of YBa2Cu3O7−y superconducting thin films i n s i t u by high-pressure reactive evaporation and rapid thermal annealing

A high-pressure reactive evaporation process has been used to produce smooth YBa2Cu3O7−y high Tc superconducting films without the necessity of a post-deposition oven anneal cycle. Augmented in some cases by rapid thermal annealing, the process has yielded films with zero resistance transition temperatures above 80 K, and critical current densities above 106 A/cm2 at 4.2 K on both cubic zirconia and SrTiO3 substrates.