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July 1, 1987Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Formation of high-quality, magnetron-sputtered Ta2O5 films by controlling the transition region at the Ta2O5/Si interface

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SSShunji SekiUniversity of Illinois Urbana-ChampaignTUTakashi UnagamiTeikyo UniversityOKOsamu KogureUtano Hospital

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Seki et al. (1987) studied this question.

synapsesocial.com/papers/6a6fbbaefebe604dd70895cchttps://doi.org/10.1116/1.574536
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