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The deleterious effects of structural changes on the quality of (001) oriented InP grown by MBE at low substrate temperatures has been investigated. For deposition below Ts=300 °C, concomitant with the loss of reconstruction in the reflection high energy electron diffraction (RHEED) pattern, the electrical properties of the epilayers begin to degrade, culminating in their total collapse at Ts =145 °C, associated with the onset of twinned growth.
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M. T. Norris (1980) studied this question.
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