Interactions between implanted Mg and base p-type dopant (Be,Zn,C) in heterojunction bipolar transistor devices

The interactions, in GaAlAs/GaAs heterojunction bipolar transistor structures, between implanted Mg atoms and different p-type base dopants (Be in layers grown by molecular beam epitaxy, Zn or C in layers grown by organometallic chemical vapor deposition) have been investigated. Different diffusion behaviors have been observed, according to the base dopant, either for the implanted Mg or for the base dopant itself. The resultant hole concentration profile obtained with a C–V electrochemical profiler has also been studied as a function of the base p-type dopant.