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January 8, 2001Applied Physics LettersOpen Access

100 nm period silicon antireflection structures fabricated using a porous alumina membrane mask

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YKYoshiaki KanamoriTohoku UniversityKHKazuhiro HaneTohoku UniversityHSHitoshi SaiNational Institute of Advanced Industrial Science and Technology

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Kanamori et al. (2001) studied this question.

synapsesocial.com/papers/6a6fd20284cc45bb7bdfab17https://doi.org/10.1063/1.1339845
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