A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 µs, and mechanical robustness to withstand 109 actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured.
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Hyman et al. (1999) studied this question.