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February 1, 2003Chemistry of Materials

Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques

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Authors

JEJeffrey W. ElamNorthwestern UniversitySGSteven M. GeorgePohang University of Science and Technology

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Elam et al. (2003) studied this question.

synapsesocial.com/papers/6a6ffef3e36a167817e1b980https://doi.org/10.1021/cm020607+
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