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October 1, 1974Journal of Applied Physics

Submicrometer resolution replication of relief patterns for integrated optics

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Authors

GAG. D. AumillerAT&T (United States)ECEdwin A. ChandrossMurray State UniversityWTW. J. TomlinsonNexor (United Kingdom)

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Aumiller et al. (1974) studied this question.

synapsesocial.com/papers/6a70691ea7fbea1e44080f23https://doi.org/10.1063/1.1663087
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