A single Si atom or a group of a few Si atoms can be extracted from a predetermined position of the Si(111)-7×7 surface through field evaporation with a scanning tunneling microscope (STM). A method of tip preparation which makes Si atom extraction reliable is presented. The results of many individual Si atom extraction experiments are discussed on the basis of the statistics of extraction with the Si(111)-7×7 unit cell.
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Huang et al. (1992) studied this question.
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