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November 1, 1975Journal of Vacuum Science and Technology

Proximity effect in electron-beam lithography

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TCT. H. P. ChangShenyang University of Technology

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T. H. P. Chang (1975) studied this question.

synapsesocial.com/papers/6a70804bb27f1581782763b7https://doi.org/10.1116/1.568515
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