New developers for poly(methyl methacrylate) consisting of mixtures of common developing components have been carefully investigated. It has been found that adding a small percentage of methyl ethyl ketone to methyl isobutyl ketone and Cellosolve results in a significant increase in contrast. Results of contrast experiments as well as improvements in electron-beam lithographic exposures are reported. An explanation of the mechanism of contrast and resolution enhancement is offered.
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Bernstein et al. (1992) studied this question.
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