Energy distribution measurements of transmitted electrons and Monte Carlo simulation for kilovolt electron

Energy distributions of kilovolt electrons transmitted through thin films of aluminium were measured with a spherical gridmesh retarding analyser mounted in a commercial-type electron probe microanalyser JXA-3. Some modifications to the Monte Carlo calculation based on continuous slowing down approximations have been made to obtain a more realistic model for electron penetration and energy loss. These calculations are compared with experimental measurements of the total energy distribution of 15 keV electrons transmitted through aluminium films of various thicknesses. Analysis and experiment are in satisfactory agreement.