Effects of frequency on the two-dimensional structure of capacitively coupled plasma in Ar

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

1. 1Smoothing and Differentiation of Data by Simplified Least Squares Procedures.1964 · 22,042 citations
2. 2Radiative lifetimes and collisional energy transfer rate constants in Ar of the Ar(3<i>p</i>55<i>p</i>) and Ar(3<i>p</i>55<i>p</i>′) states1982 · 51 citations
3. 3High selectivity plasma etching of silicon dioxide with a dual frequency 27/2 MHz capacitive radio frequency discharge1996 · 84 citations
4. 4Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge1995 · 98 citations
5. 5Diffusion tensor in electron transport in gases in a radio-frequency field1997 · 74 citations